Lithography & petterning

TSL - with their experience of coating, vacuum brazing , and more recently lithography / micro-machining have been able to construct some interesting devices for Lab-on-a-Chip, and Micro-fluidic applications.

Examples of masks and Lab-on-a-Chip cells

Key Benefits

Micro-fabrication of cells and reaction volumes
Micro-patterning through masking followed by wet or dry etching, including RIE (Reactive Ion Etching).
Micro-patterning in quartz, glasses and machineable glass ceramics
Quartz fusing to fabricate cells
Patterned metallisations for low temperature brazing to fabricate cells
Choice of deposition technologies optimised for particular coatings
Good process control gives the result needed reproducibly

Capabilities

Capability 1: Sputter deposition of metallic layers onto glasses, fused quartz, machineable glass ceramics etc
Capability 2: Lithographic patterning through masking and etching
Capability 3: Clean vacuum brazing to produce high integrity micro reaction volumes, mixing channels etc.